Vorwort | 6 |
Inhaltsverzeichnis | 8 |
1 Einführung | 14 |
1.1 Was ist ein Mikrosystem? | 17 |
1.2 Mikroelektronik und Mikrosystemtechnik | 21 |
1.3 Anwendungsfelder und Entwicklungstrends | 23 |
1.4 Beispiel Drehratensensor | 24 |
2 Skalierung und Ähnlichkeit | 32 |
Skalierung | 32 |
Ähnlichkeit und Kennzahlen | 38 |
3 Werkstoffe | 44 |
Übersicht | 44 |
Einkristallines Silizium | 48 |
Beschreibung der Orientierung von Flächen und Ri | 49 |
Oberflächeneigenschaften bei verschiedener Orien | 56 |
Anisotrope elastische Eigenschaften | 57 |
Festigkeit | 60 |
Siliziumscheiben | 64 |
Gläser | 68 |
Allgemeine Eigenschaften von Glas | 69 |
Viskoelastisches Verhalten | 70 |
Gläser in der Mikrosystemtechnik | 72 |
Polymere | 74 |
Thermoplastische Werkstoffe in der Mikrosystemtechnik | 75 |
Allgemeine Eigenschaften | 75 |
Mechanische Eigenschaften | 76 |
Thermoplastische Polymere | 76 |
Fotoresist | 78 |
Negativresiste | 79 |
Positivresiste | 79 |
Dünnschichten | 80 |
Siliziumoxid, Siliziumnitrid | 83 |
Elektrisch leitende Schichten | 85 |
Polysiliziumschichten | 85 |
Materialeigenschaften im Vergleich | 86 |
4 Mikrotechnische Fertigungsverfahren | 89 |
Überblick | 89 |
Reinheit in der Fertigung | 95 |
Reinraumtechnik | 96 |
Ausbeute | 97 |
Reinraum | 98 |
Waferreinigung | 100 |
Lithografie | 102 |
Prinzip | 102 |
Lithografischer Prozess | 103 |
Minimal strukturierbare Linienbreiten | 106 |
Doppelseitenlithografie | 107 |
Lithografie in stark profilierten Strukturen | 107 |
Schichtherstellung | 108 |
Überblick | 108 |
Schichtkonformität | 110 |
Thermische Oxidation | 110 |
Aufdampfen | 112 |
Sputtern | 114 |
Chemische Gasphasenabscheidung | 116 |
Vergleich | 118 |
Schichtstrukturierung | 119 |
Grundlagen | 119 |
Nassätzen | 121 |
Trockenätzen | 121 |
Lift-off-Prozess | 124 |
Anisotropes nasschemisches Tiefenätzen | 124 |
Prinzip | 125 |
Anisotrope Ätzlösungen | 126 |
Ätzraten | 127 |
Ätzstoppverfahren | 130 |
Ätzfiguren | 132 |
Ätzratendiagramme | 132 |
Herausbildung von Ätzfiguren | 134 |
Unterätzung konvexer Ecken | 140 |
Entwurf von Ätzmasken | 141 |
Dotierung | 143 |
Diffusion | 143 |
Diffusionsgesetz | 144 |
Dotierquellen | 145 |
Diffusionsprofil | 145 |
Thermisches Budget | 146 |
Ionenimplantation | 147 |
Dotierungsprofil | 147 |
Strahlenschäden und Ausheilung | 149 |
Anwendung | 149 |
Vergleich der Dotierungsverfahren | 149 |
Verbindungsverfahren | 150 |
Eutektisches Bonden | 151 |
Anodisches Bonden | 152 |
Siliziumdirektbonden | 153 |
Vergleich der Verbindungsverfahren | 153 |
Isolationstechniken | 154 |
SIMOX-Verfahren | 155 |
BESOI-Verfahren | 156 |
Smart-Cut-Verfahren | 158 |
Oberflächenmikromechanik | 159 |
Prinzip | 159 |
Herstellung von Hohlräumen | 162 |
Haften beweglicher Strukturen | 165 |
Haftung durch Flüssigkeitsfilme | 165 |
Vermeidung von haftenden Strukturen | 166 |
Vergleich von Volumen- und Oberflächenmikromecha | 168 |
Oberflächennahe Mikromechanik | 168 |
Prinzip | 169 |
Verfahren | 169 |
a)SCREAM-Prozess | 169 |
b)SIMPLE-Prozess | 171 |
HARMST | 172 |
Begriffsbestimmung | 172 |
LIGA-Verfahren | 172 |
Miniaturisierte klassische Verfahren | 174 |
Mikrospritzgießen | 176 |
Mikroheißprägen | 179 |
Mikrozerspanen | 180 |
Auswahl von mikrotechnischen Fertigungsverfahren | 183 |
BookmarkLevel: 3BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: a)Grundformen und Synthese der GesamtgestaltBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: b)FormbegrenzungBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: c)Auswahl der VerfahrensschritteBookmarkLevel: 4BookmarkPageNumber: 185BookmarkBeginBookmarkTitle: 5 Aufbau- und VerbindungstechnikBookmarkLevel: 1BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Aufgaben und AnforderungenBookmarkLevel: 2BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: AufgabenBookmarkLevel: 3BookmarkPageNumber: 191BookmarkBeginBookmarkTitle: Zuverlässigkeitsgerechtes PackagingBookmarkLevel: 3BookmarkPageNumber: 195BookmarkBeginBookmarkTitle: Funktionen der Aufbau- und VerbindungstechnikBookmarkLevel: 2BookmarkPageNumber: 196BookmarkBeginBookmarkTitle: Mechanische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: SubstratwerkstoffeBookmarkLevel: 4BookmarkPageNumber: 197BookmarkBeginBookmarkTitle: Monolithische versus HybridintegrationBookmarkLevel: 4BookmarkPageNumber: 198BookmarkBeginBookmarkTitle: Thermische AnpassungBookmarkLevel: 4BookmarkPageNumber: 200BookmarkBeginBookmarkTitle: Elektrische VerbindungenBookmarkLevel: 3BookmarkPageNumber: 201BookmarkBeginBookmarkTitle: WärmeabführungBookmarkLevel: 3BookmarkPageNumber: 202BookmarkBeginBookmarkTitle: Verkapselung und GehäusungBookmarkLevel: 3BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: a)BeschichtungenBookmarkLevel: 4BookmarkPageNumber: 203BookmarkBeginBookmarkTitle: b)TrennmembranenBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: c)VerkapselungBookmarkLevel: 4BookmarkPageNumber: 204BookmarkBeginBookmarkTitle: d)Hermetische AbdichtungBookmarkLevel: 4BookmarkPageNumber: 205BookmarkBeginBookmarkTitle: 6 Funktions- und Formelemente der MikrosystemtechnikBookmarkLevel: 1BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Mechanische ElementeBookmarkLevel: 2BookmarkPageNumber: 210BookmarkBeginBookmarkTitle: Empfindlichkeit in NutzrichtungBookmarkLevel: 3BookmarkPageNumber: 213BookmarkBeginBookmarkTitle: QuerempfindlichkeitBookmarkLevel: 3BookmarkPageNumber: 216BookmarkBeginBookmarkTitle: EigenfrequenzBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: DämpfungBookmarkLevel: 3BookmarkPageNumber: 217BookmarkBeginBookmarkTitle: GüteBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: AmplitudengangBookmarkLevel: 3BookmarkPageNumber: 219BookmarkBeginBookmarkTitle: Spannung an der EinspannstelleBookmarkLevel: 3BookmarkPageNumber: 220BookmarkBeginBookmarkTitle: Fluidische ElementeBookmarkLevel: 2BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: Kennzahlen und ModellsystemeBookmarkLevel: 3BookmarkPageNumber: 225BookmarkBeginBookmarkTitle: ElementtypenBookmarkLevel: 3BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: Fluidischer WiderstandBookmarkLevel: 4BookmarkPageNumber: 229BookmarkBeginBookmarkTitle: b\)Fluidische KapazitätBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: c\)Fluidische TrägheitBookmarkLevel: 4BookmarkPageNumber: 231BookmarkBeginBookmarkTitle: Fluidische SchnittstellenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: Entwurf mikrofluidischer Elemente und KomponentenBookmarkLevel: 3BookmarkPageNumber: 232BookmarkBeginBookmarkTitle: a)Entwurf mikrofluidischer ElementeBookmarkLevel: 4BookmarkPageNumber: 233BookmarkBeginBookmarkTitle: b)Entwurf mikrofluidischer KomponentenBookmarkLevel: 4BookmarkPageNumber: 235BookmarkBeginBookmarkTitle: Thermische ElementeBookmarkLevel: 2BookmarkPageNumber: 237BookmarkBeginBookmarkTitle: Thermisch-elektrische AnalogienBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: Grundgleichungen für den WärmetransportBookmarkLevel: 3BookmarkPageNumber: 238BookmarkBeginBookmarkTitle: ErsatzschaltungenBookmarkLevel: 3BookmarkPageNumber: 243BookmarkBeginBookmarkTitle: 7 Sensoren und AktorenBookmarkLevel: 1BookmarkPageNumber: 251BookmarkBeginBookmarkTitle: Umkehrbare und parametrische WandlerBookmarkLevel: 2BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 252BookmarkBeginBookmarkTitle: Parametrische WandlerBookmarkLevel: 3BookmarkPageNumber: 259BookmarkBeginBookmarkTitle: Stationäre umkehrbare WandlerBookmarkLevel: 3BookmarkPageNumber: 261BookmarkBeginBookmarkTitle: Wandler für Sensoren und AktorenBookmarkLevel: 2BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Elektrostatische WandlerBookmarkLevel: 3BookmarkPageNumber: 264BookmarkBeginBookmarkTitle: Piezoelektrische WandlerBookmarkLevel: 3BookmarkPageNumber: 270BookmarkBeginBookmarkTitle: Elektrodynamische WandlerBookmarkLevel: 3BookmarkPageNumber: 273BookmarkBeginBookmarkTitle: Thermomechanische WandlerBookmarkLevel: 3BookmarkPageNumber: 279BookmarkBeginBookmarkTitle: a\)Thermische Ausdehnung von FestkörpernBookmarkLevel: 4BookmarkPageNumber: 280BookmarkBeginBookmarkTitle: b)Thermische Ausdehnung von BimaterialienBookmarkLevel: 4BookmarkPageNumber: 282BookmarkBeginBookmarkTitle: c\)Thermische Ausdehnung von Gasen und FlüssigkBookmarkLevel: 4BookmarkPageNumber: 285BookmarkBeginBookmarkTitle: Piezoresistive WandlerBookmarkLevel: 3BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: a)Piezoresistiver EffektBookmarkLevel: 4BookmarkPageNumber: 287BookmarkBeginBookmarkTitle: b)Piezoresistive SensorenBookmarkLevel: 4BookmarkPageNumber: 292BookmarkBeginBookmarkTitle: 8 Entwurf von MikrosystemenBookmarkLevel: 1BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Entwurfsmethoden und WerkzeugeBookmarkLevel: 2BookmarkPageNumber: 307BookmarkBeginBookmarkTitle: Systeme mit konzentrierten ParameternBookmarkLevel: 2BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Verhaltensbeschreibung elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 314BookmarkBeginBookmarkTitle: Analyse des statischen Verhaltens elektromechaniBookmarkLevel: 3BookmarkPageNumber: 315BookmarkBeginBookmarkTitle: Analyse elektromechanischer Systeme bei harmonischen LastenBookmarkLevel: 3BookmarkPageNumber: 318BookmarkBeginBookmarkTitle: Transiente Analyse elektromechanischer SystemeBookmarkLevel: 3BookmarkPageNumber: 322BookmarkBeginBookmarkTitle: Systeme mit verteilten ParameternBookmarkLevel: 2BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Verhaltensbeschreibung mittels analytischer ModelleBookmarkLevel: 3BookmarkPageNumber: 325BookmarkBeginBookmarkTitle: Numerische Methoden auf der Basis der Finiten-Elemente-MethodeBookmarkLevel: 3BookmarkPageNumber: 328BookmarkBeginBookmarkTitle: Makromodellierung komplexer Systeme durch OrdnungsreduktionBookmarkLevel: 3BookmarkPageNumber: 330BookmarkBeginBookmarkTitle: 9 Einfluss technologischer Prozesse auf MikrosystemeigenschaftenBookmarkLevel: 1BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Parameterbasierter MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 339BookmarkBeginBookmarkTitle: Robuster MikrosystementwurfBookmarkLevel: 2BookmarkPageNumber: 343BookmarkBeginBookmarkTitle: AnhangBookmarkLevel: 1BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang A Physikalische KonstantenBookmarkLevel: 2BookmarkPageNumber: 352BookmarkBeginBookmarkTitle: Anhang B KoordinatentransformationBookmarkLevel: 2BookmarkPageNumber: 353BookmarkBeginBookmarkTitle: B.1 Elastische KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 354BookmarkBeginBookmarkTitle: B.2 Piezoresistive KoeffizientenBookmarkLevel: 3BookmarkPageNumber: 357BookmarkBeginBookmarkTitle: Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-SchichtenBookmarkLevel: 2BookmarkPageNumber: 360BookmarkBeginBookmarkTitle: Anhang D Nomenklatur von DünnschichtprozessenBookmarkLevel: 2BookmarkPageNumber: 362BookmarkBeginBookmarkTitle: Anhang E Haftung bei oberflächen-mikromechaniscBookmarkLevel: 2BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.1 KapillarkräfteBookmarkLevel: 3BookmarkPageNumber: 365BookmarkBeginBookmarkTitle: E.2 Kritische Länge von BiegefedernBookmarkLevel: 3BookmarkPageNumber: 366BookmarkBeginBookmarkTitle: SymbolverzeichnisBookmarkLevel: 1BookmarkPageNumber: 368BookmarkBeginBookmarkTitle: AbkürzungsverzeichnisBookmarkLevel: 1BookmarkPageNumber: 376BookmarkBeginBookmarkTitle: StichwortverzeichnisBookmarkLevel: 1BookmarkPageNumber: 381BookmarkBeginBookmarkTitle: Mehr eBooks bei www.ciando.comBookmarkLevel: 1BookmarkPageNumber: 0PageMediaBeginPageMediaNumber: 1PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaBeginPageMediaNumber: 2PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 3PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 842PageMediaBeginPageMediaNumber: 4PageMediaRotation: 0PageMediaRect: 0 0 595 842PageMediaDimensions: 595 842PageMediaCropRect: 170.079 249.449 595 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754.126PageLabelBeginPageLabelNewIndex: 1PageLabelStart: 1PageLabelNumStyle: NoNumberPageLabelBeginPageLabelNewIndex: 2PageLabelStart: 1PageLabelNumStyle: DecimalArabicNumeralsTitle: 3446405232Subject:Keywords:Author: installCreator: PDFCreator Professional 4.2.0Producer: GPL Ghostscript 9.52CreationDate: Wed May 5 17:03:43 2021 CESTModDate: Wed May 5 17:03:43 2021 CESTTagged: noUserProperties: noSuspects: noForm: noneJavaScript: noPages: 386Encrypted: noPage size: 595 x 842 pts (A4)Page rot: 0File size: 12306878 bytesOptimized: noPDF version: 1.4 | 185 |
a)Grundformen und Synthese der Gesamtgestalt | 185 |
b)Formbegrenzung | 185 |
c)Auswahl der Verfahrensschritte | 185 |
5 Aufbau- und Verbindungstechnik | 191 |
Aufgaben und Anforderungen | 191 |
Aufgaben | 191 |
Zuverlässigkeitsgerechtes Packaging | 195 |
Funktionen der Aufbau- und Verbindungstechnik | 196 |
Mechanische Verbindungen | 197 |
Substratwerkstoffe | 197 |
Monolithische versus Hybridintegration | 198 |
Thermische Anpassung | 200 |
Elektrische Verbindungen | 201 |
Wärmeabführung | 202 |
Verkapselung und Gehäusung | 203 |
a)Beschichtungen | 203 |
b)Trennmembranen | 204 |
c)Verkapselung | 204 |
d)Hermetische Abdichtung | 205 |
6 Funktions- und Formelemente der Mikrosystemtechnik | 210 |
Mechanische Elemente | 210 |
Empfindlichkeit in Nutzrichtung | 213 |
Querempfindlichkeit | 216 |
Eigenfrequenz | 217 |
Dämpfung | 217 |
Güte | 219 |
Amplitudengang | 219 |
Spannung an der Einspannstelle | 220 |
Fluidische Elemente | 225 |
Kennzahlen und Modellsysteme | 225 |
Elementtypen | 229 |
Fluidischer Widerstand | 229 |
b\)Fluidische Kapazität | 231 |
c\)Fluidische Trägheit | 231 |
Fluidische Schnittstellen | 232 |
Entwurf mikrofluidischer Elemente und Komponenten | 232 |
a)Entwurf mikrofluidischer Elemente | 233 |
b)Entwurf mikrofluidischer Komponenten | 235 |
Thermische Elemente | 237 |
Thermisch-elektrische Analogien | 238 |
Grundgleichungen für den Wärmetransport | 238 |
Ersatzschaltungen | 243 |
7 Sensoren und Aktoren | 251 |
Umkehrbare und parametrische Wandler | 252 |
Umkehrbare Wandler | 252 |
Parametrische Wandler | 259 |
Stationäre umkehrbare Wandler | 261 |
Wandler für Sensoren und Aktoren | 264 |
Elektrostatische Wandler | 264 |
Piezoelektrische Wandler | 270 |
Elektrodynamische Wandler | 273 |
Thermomechanische Wandler | 279 |
a\)Thermische Ausdehnung von Festkörpern | 280 |
b)Thermische Ausdehnung von Bimaterialien | 282 |
c\)Thermische Ausdehnung von Gasen und Flüssigk | 285 |
Piezoresistive Wandler | 287 |
a)Piezoresistiver Effekt | 287 |
b)Piezoresistive Sensoren | 292 |
8 Entwurf von Mikrosystemen | 307 |
Entwurfsmethoden und Werkzeuge | 307 |
Systeme mit konzentrierten Parametern | 314 |
Verhaltensbeschreibung elektromechanischer Systeme | 314 |
Analyse des statischen Verhaltens elektromechani | 315 |
Analyse elektromechanischer Systeme bei harmonischen Lasten | 318 |
Transiente Analyse elektromechanischer Systeme | 322 |
Systeme mit verteilten Parametern | 325 |
Verhaltensbeschreibung mittels analytischer Modelle | 325 |
Numerische Methoden auf der Basis der Finiten-Elemente-Methode | 328 |
Makromodellierung komplexer Systeme durch Ordnungsreduktion | 330 |
9 Einfluss technologischer Prozesse auf Mikrosystemeigenschaften | 339 |
Parameterbasierter Mikrosystementwurf | 339 |
Robuster Mikrosystementwurf | 343 |
Anhang | 352 |
Anhang A Physikalische Konstanten | 352 |
Anhang B Koordinatentransformation | 353 |
B.1 Elastische Koeffizienten | 354 |
B.2 Piezoresistive Koeffizienten | 357 |
Anhang C Eigenschaften von Siliziumoxid- und Siliziumnitrid-Schichten | 360 |
Anhang D Nomenklatur von Dünnschichtprozessen | 362 |
Anhang E Haftung bei oberflächen-mikromechanisc | 365 |
E.1 Kapillarkräfte | 365 |
E.2 Kritische Länge von Biegefedern | 366 |
Symbolverzeichnis | 368 |
Abkürzungsverzeichnis | 376 |
Stichwortverzeichnis | 381 |
Mehr eBooks bei www.ciando.com | 0 |